EO Dektophintergründe

Abkürzungen in der Elektronenmikroskopie

Abkürzung

Erklärung

3D

Three Dimensional

ADC

Analog to Digital Converter

AE

Absorbed Electrons

AEI

Absorbed Electron Imaging

AFM

Atomic Force Microscope

BE

Backscattered Electron (Rückstreuelektronen)

BEI

Backscattered Electron Imaging

BF

Bright Field

BSE

BackScattered Electron (Rückstreuelektronen)

BSED

BackScattered Electron Detector

CL

Cathodoluminescence

DF

Dark Field

DIB

Dual Ion Beam

DQE

Detective Quantum Efficiency

EBIC

Electron Beam Induced Current/Conductivity

EBSD

Electron BackScattered Diffraction

EBSP

Electron BackScattered diffraction Pattern

ECCI

Electron Channeling Contrast Imaging

ECP

Electron Channeling Pattern

EDS

Energy Dispersive x-ray Spectrometry

EDX

Energy Dispersive X-ray spectrometry

EPMA

Electron Probe MicroAnalysis

ESEM

Environmental Scanning Electron Microscope

ESMA

ElektronenStrahl-MikroAnalyse

E-T

Everhard-Thornley

FE

Field Emission (Feldemission)

FEG

Field Emission Gun

FFT

Fast Fourier Transform

FIB

Focused Ion Beam

FIB-REM

Focused Ion Beam Rasterelektronenmikroskop

FIB-SEM

Focused Ion Beam Scanning Electron Microscope

FWHM

Full Width at Half Maximum

GIS

Gas Injection System

GSR

GunShot Residue

HV

High Voltage (Hochspannung)

HR

High Resolution (Hochauflösung)

IBSC

Ion Beam Slope Cutting (Böschungsätzen)

IPF

Inverse Pole Figure

IR

Infrared

KL

Kathodolumineszens

LEEM

Low Energy Electron Microscope

LMIS

Liquid Metal Ion Source

LM

Ligh Microscope

OIM

Orientation Imaging Microscopy

PC

Probe Current (Probenstrom)

PFIB

Plasma Focused Ion Beam

PFIB-REM

Plasma Focused Ion Beam Rasterelektronenmikroskop

PFIB-SEM

Plasma Focused Ion Beam Scanning Electron Microscope

RE

Rückstreuelektronen

REM

Rasterelektronenmikroskop

SDD

Silicon Drift Detector

SE

Secondary Electron (Sekundärelektronen)

SED

Secondary Electron Detector

SEM

Scanning Electron Microscope

SPM

Scanning Probe Microscope

TE

Transmitted Electron (Transmittierte Elektronen)

TEM

Transmission Electron Microscope

TOF-SIMS

Time-Of-Flight Secondary Ion Mass Spectrometer/Spectrometry

UHR

Ultra-High Resolution

UHV

Ultra-High Vacuum

UPS

Uninterrupted Power Supply

UV

UltraViolet

VP

Variable Pressure

WD

Working Distance (Arbeitsabstand)

WDS

Wavelength Dispersive x-ray Spectrometry

WDX

Wavelength Dispersive X-ray spectrometry

YAG

Yttrium Aluminium Garnet